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Solution Provider of Wafer Inspection
System and In-situ Process Monitoring

PRODUCTS INFO

PLATO-Series

PLATO is a non-destructive mapping measurement system that using PL(Photoluminescence) phenomenon.

MiPLATO-LED

Micro-LED is one of the areas that are
expected to be developed in the future,
as it is technically and theoretically...

MiPLATO-SiC

Internal defects, which are not observed in conventional microscope images, have a significant effect on product yield...

PyroSense® Series

PyroCurveSense measures reflectivity
of three different wavelengths,

OPM Series

OPM Series are spectral transmittance or reflectance measurement system.

MiFilmSense

MFS is a table-type reflectance and thickness measuring device for thin film.

MiPLATO - SiC
(Micro PL measurement system for SiC)

MiPLATO-SiC – Automatic Micro Photoluminescence Mapper for SiC Application_EtaMax Co.,Ltd.