LED
LED
Feature.
• High-speed Micro PL Intensity Mapper with highly sensitive PMT
• R,G,B chip on wafer & Epi wafer measurement with size of 4″, 6”
• Simultaneous measurement of PL and Reflection (or Scattering) (patented)
• LED chip detection with leakage current
• Micro LED inspection.
– Low intensity, no PL signal, abnormal high PL intensity can be classified
– Chip indexing
– Defect coordinating and reporting
• Microscopic image observation of specific areas
• Spectral characteristics analysis possible by designating a specific area in PL Mapping Data (mapping possible)
• Signal measurement in selective wavelength range using a monochromator is possible (Option)
• Epi wafer inspection
Configuration.
• Spiral scan with 1800 RPM (Max) rotation stage
• Micro PL with 20x objective lens
– Incl. 4x, 10x, 50x objective lens for microscope image
– 2um beam size
– Simultaneous measurement of PL and reflection
• Multi detectors :
– PMT : Reflection(Scattering), PL of LED
– Spectrometer
Mapping Result.
General Specification.
| General | Scan method | Spiral scan with 1800 RPM rotation and linear motion | ||
| Wafer | 4＂, 6＂ | |||
| Stage | XY-axis Linear stage, Z axis stage R stage with 1800RPM (Max) |
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| Measurement | Objective Lens | 5X, 10X, 20X, 50X Laser excitation without objective lens (Option) |
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| Image Camera | Resolution : 2048 x 2048 (4M pixel) Pixel size : 5.5 um x 5.5 um |
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| Optical Fiber | 400 um bundle core | |||
| PMT | Port 1 (PMT 1) : PL Inspection with bandpass filter Port 2 (PMT 2) : Reflection (Scattering) |
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| Spectrometer | Groove Density : 300 lines/ mm Spectral range (nm) : 210 – 2100 Pixel (ea) : 2048 x 64 Dispersion : 0.44 nm / pixel |
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| Excitation Source | 50 mW 375 nm Laser (for Blue, Green LED) 50 mW 532 nm Laser (for Red LED) |
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| Measurement speed | 4inch | 6inch | ||
| PMT Mapping (2 channel at same time, 5um step) |
8pcs / 1H | 6pcs / 1H | ||
| PMT Mapping & Spectrum mapping (Optional measurement) |
7 pcs / 1H (PMT : 5um / Spectrum : 2mm ) |
7 pcs / 1H (PMT : 5um / Spectrum : 4mm ) |
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| Micro Spectrometer mapping | 3,600 points / hour Step : Min. 2um | |||
| Dimension (mm) | 2000 (w) x 1400 (d) x 2000 (h) | |||
Utility.
| Operating Environment | Place | Clean Room (class ~ 10000) |
| Temperature | 15 ~ 35° C | |
| Humidity | <85% RH with no condensation | |
| Utility | Dimensions | 1500 mm x 2000 mm x 2300 mm, incl. HEPA filter |
| Weight | 1760 Kg | |
| Input Voltage | 220V±10% 50/60Hz single phase | |
| Full load current | 47A | |
| Vacuum1 | 40L/min, -80KPa Pipe size : Outer diameter 6mm |
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| Vacuum2 | 120L/min, -40KPa Pipe size : Outer diameter 6mm |
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| Air | 90L/min, 0.5MPa Pipe size : Outer diameter 6mm |