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LED

LED

MiPLATO-LED

Micro Photoluminescence mapping system

Feature.

• High-speed Micro PL Intensity Mapper with highly sensitive PMT
• R,G,B chip on wafer & Epi wafer measurement with size of 4″, 6”
• Simultaneous measurement of PL and Reflection (or Scattering) (patented)
• LED chip detection with leakage current
• Micro LED inspection.
  – Low intensity, no PL signal, abnormal high PL intensity can be classified
  – Chip indexing
  – Defect coordinating and reporting
• Microscopic image observation of specific areas
• Spectral characteristics analysis possible by designating a specific area in PL Mapping Data (mapping possible)
• Signal measurement in selective wavelength range using a monochromator is possible (Option)
• Epi wafer inspection

Configuration.

• Spiral scan with 1800 RPM (Max) rotation stage
• Micro PL with 20x objective lens
  – Incl. 4x, 10x, 50x objective lens for microscope image
  – 2um beam size
  – Simultaneous measurement of PL and reflection
• Multi detectors :
  – PMT : Reflection(Scattering), PL of LED
  – Spectrometer

Mapping Result.​

General Specification.​

General Scan method Spiral scan with 1800 RPM rotation and linear motion
Wafer 4", 6"
Stage XY-axis Linear stage, Z axis stage
R stage with 1800RPM (Max)
Measurement Objective Lens 5X, 10X, 20X, 50X
Laser excitation without objective lens (Option)
Image Camera Resolution : 2048 x 2048 (4M pixel)
Pixel size : 5.5 um x 5.5 um
Optical Fiber 400 um bundle core
PMT Port 1 (PMT 1) : PL Inspection with bandpass filter
Port 2 (PMT 2) : Reflection (Scattering)
Spectrometer Groove Density : 300 lines/ mm
Spectral range (nm) : 210 – 2100
Pixel (ea) : 2048 x 64
Dispersion : 0.44 nm / pixel
Excitation Source 50 mW 375 nm Laser (for Blue, Green LED)
50 mW 532 nm Laser (for Red LED)
Measurement speed 4inch 6inch
PMT Mapping
(2 channel at same time, 5um step)
8pcs / 1H 6pcs / 1H
PMT Mapping & Spectrum mapping
(Optional measurement)
7 pcs / 1H
(PMT : 5um / Spectrum : 2mm )
7 pcs / 1H
(PMT : 5um / Spectrum : 4mm )
Micro Spectrometer mapping 3,600 points / hour Step : Min. 2um
Dimension (mm) 2000 (w) x 1400 (d) x 2000 (h)

Utility.

Operating Environment Place Clean Room (class ~ 10000)
Temperature 15 ~ 35° C
Humidity <85% RH with no condensation
Utility Dimensions 1500 mm x 2000 mm x 2300 mm, incl. HEPA filter
Weight 1760 Kg
Input Voltage 220V±10% 50/60Hz single phase
Full load current 47A
Vacuum1 40L/min, -80KPa
Pipe size : Outer diameter 6mm
Vacuum2 120L/min, -40KPa
Pipe size : Outer diameter 6mm
Air 90L/min, 0.5MPa
Pipe size : Outer diameter 6mm