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PLATO-LED

PLATO-LED

PyroSense® Series

Real-time in-situ monitoring system

Features.

• Application : MOCVD, MBE, Thermal CVD
• Materials : Si, Ga(Al, In)N, SiC, GaAs, InP
• Monitoring : Emissivity corrected temperature, reflectivity and curvature
• Reflectivity : Three different wavelengths : 405, 633, 950nm
• Analysis : Growth rate and thickness
• Multi-channel : Up to 3 optical heads
• User-friendly program interface

Product Line.

Model Temperature Reflectivity Curvature
PyroSense® O O X
PyroCurveSense® O O O
PyroCurveSense+® O (2 Ch) O (2 Ch) O
PyroCurveSense++® O (3 Ch) O (3 Ch) O

Program.​

Specification.​

Model PyroSense PyroCurveSense / PyroCurveSense+ PyroCurveSense++
Temperature Range [°C] 450 ~ 1,500
Resolution [°C] 0.1
Accuracy [°C] ±1.0
Wavelength [nm] 950 ± 5
Sampling rate [Hz] 1,000 50,000
Reflectivity Wavelength [nm] 405, 633, 950 ± 5
Range [%] 0 ~ 100
Resolution [%] 0.1
Accuracy [%] ±1.0
Growth rate
Accuracy [%]
±1.5
Sampling rate [Hz] 1,000 50,000
Curvature Range [km-1] -1,400(concave) ~ +2,000 (convex)
Resolution [km-1] 2.0
Accuracy [km-1] ±1.0
General RPM [rpm] 5 ~ 120 100 ~ 1,200
Power [V] AC 110~220 (50/60Hz)
Dimension [mm]
(W X H X D)
Head : 35X34X93
Controller : 250X300X90
Head 1 : 35X34X93
Head 2 : 157X58X134
Controller : 250X300X90
Head 1 : 35X34X93
Head 2 : 95X58X134
Controller : 250X300X90
Weight [kg] Head : 0.6
Controller : 3.0
Head 1 : 0.6
Head 2 : 2.0
Controller : 3.0
Head 1 : 0.6
Head 2 : 1.5
Controller : 3.0