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WAFER INSPECTION

WAFER INSPECTION

PLATO-LED

Automatic Photoluminescence mapping system

General Spec.

• Photoluminescence Mapping : Peak wavelength, Peak intensity, Integrated intensity, FWHM, Al contents in AlGaN layer
• Thickness mapping : Thin-film thickness of GaN layer
• Bow measurement (optional)
• 2”, 3”, 4”, 150mm, 200mm SEMI standard wafer
• 300mm SEMI standard wafer (optional)
• 3 lasers available : 213nm, 266nm, 325nm, 375nm, 405nm, 532nm, 980nm, 1064nm, …
• Auto focus function to measure wafers of various thicknesses without modifying the measurement recipe.
• Excel, CSV export with flexible form.
• SECS/GEM, MES compatible
• The most popular PL mapping system sold more than 250 units worldwide(9 countries, 63 customers).

Option List.

Light sourceUV213nm, 266nm, 325nm
VIS375nm, 405nm, 532nm
NIR980nm, 1064nm
Measurement ItemDBR MeasurementVisible range, NIR range
Bow Measurement10~1000um
Laser MarkingCE-CoC, CE-DoC, KCs, S-MarkSapphire, Si, GaAs
Wafer TransferRobot typeSingle-arm, Dual-arm
Cassette mapping sensor
Wafer sizeSEMI standard 2”, 3”, 4”, 6”, 8”, 12”
Cassette typeOpen Cassette, SMIF, FOUP
IdentificationWafer ID reader, Cassette ID reader
CertificationCE-CoC, CE-DoC, KCs, S-Mark
Etc.SECS/GEM

PLATO GaN Power Device/UV-C

Automatic Photoluminescence mapping system

PLATO data :UV-C with 213nm laser.

PLATO data : GaN Power device Al% with 266nm laser.

Bow measurement with Displacement sensor .

PLATO VCSEL and NIR LD

Automatic Photoluminescence mapping system

PLATO data : 940nm VCSEL.

PLATO data : NIR for optical communication and gas sensor.

Special functions of PLATO

Specification.

Light source UV 213nm, 266nm, 325nm
VIS 375nm, 405nm, 532nm
NIR 980nm, 1064nm
Measurement Item DBR 측정 Visible range, NIR range
Bow 측정 10~1000um
Laser Marking CE-CoC, CE-DoC, KCs, S-Mark Sapphire, Si, GaAs
Wafer Transfer Robot type Single-arm, Dual-arm
Cassette mapping sensor
Wafer size SEMI standard 2”, 3”, 4”, 6”, 8”, 12”
Cassette type Open Cassette, SMIF, FOUP
Identification Wafer ID reader, Cassette ID reader
Certification CE-CoC, CE-DoC, KCs, S-Mark
Etc. SECS/GEM