Solution Provider of Wafer Inspection
System and In-situ Process Monitoring
PRODUCTS INFO
PLATO-Series
PLATO is a non-destructive mapping measurement system that using PL(Photoluminescence) phenomenon.
MiPLATO-LED
Micro-LED is one of the areas that are
expected to be developed in the future,
as it is technically and theoretically...
MiPLATO-SiC
Internal defects, which are not observed in conventional microscope images, have a significant effect on product yield...
PyroSense® Series
PyroCurveSense measures reflectivity
of three different wavelengths,
OPM Series
OPM Series are spectral transmittance or reflectance measurement system.
MiFilmSense
MFS is a table-type reflectance and thickness measuring device for thin film.
MiPLATO - SiC
(Micro PL measurement system for SiC)
(Micro PL measurement system for SiC)
MiPLATO-SiC – Automatic Micro Photoluminescence Mapper for SiC Application_EtaMax Co.,Ltd.