Solution Provider of Wafer Inspection System and In-situ Process Monitoring
EtaMax has become a family of HORIBA in April 2025.
PRODUCTS INFO
Automated Wafer Inspection System
HORIBA offers photoluminescence (PL)-based wafer inspection systems for fast, non-destructive evaluation, and reliable defect analysis of semiconductor and compound wafers.
In-Situ Monitoring System
PyroSense® series provides real-time, non-contact temperature measurement solutions, enabling precise thermal monitoring and process control in semiconductor and industrial applications.
MiPLATO - SiC
(Micro PL measurement system for SiC)
(Micro PL measurement system for SiC)
MiPLATO-SiC – Automatic Micro Photoluminescence Mapper for SiC Application_EtaMax Co.,Ltd.