WAFER INSPECTION
WAFER INSPECTION
General Spec.
• Photoluminescence Mapping : Peak wavelength, Peak intensity, Integrated intensity, FWHM, Al contents in AlGaN layer
• Thickness mapping : Thin-film thickness of GaN layer
• Bow measurement (optional)
• 2”, 3”, 4”, 150mm, 200mm SEMI standard wafer
• 300mm SEMI standard wafer (optional)
• 3 lasers available : 213nm, 266nm, 325nm, 375nm, 405nm, 532nm, 980nm, 1064nm, …
• Auto focus function to measure wafers of various thicknesses without modifying the measurement recipe.
• Excel, CSV export with flexible form.
• SECS/GEM, MES compatible
• The most popular PL mapping system sold more than 250 units worldwide(9 countries, 63 customers).
Option List.
| Light source | UV | 213nm, 266nm, 325nm |
| VIS | 375nm, 405nm, 532nm | |
| NIR | 980nm, 1064nm | |
| Measurement Item | DBR Measurement | Visible range, NIR range |
| Bow Measurement | 10~1000um | |
| Laser Marking | CE-CoC, CE-DoC, KCs, S-Mark | Sapphire, Si, GaAs |
| Wafer Transfer | Robot type | Single-arm, Dual-arm |
| Cassette mapping sensor | ||
| Wafer size | SEMI standard 2”, 3”, 4”, 6”, 8”, 12” | |
| Cassette type | Open Cassette, SMIF, FOUP | |
| Identification | Wafer ID reader, Cassette ID reader | |
| Certification | CE-CoC, CE-DoC, KCs, S-Mark | |
| Etc. | SECS/GEM | |
PLATO GaN Power Device/UV-C
Automatic Photoluminescence mapping system
PLATO data :UV-C with 213nm laser.
PLATO data : GaN Power device Al% with 266nm laser.
Bow measurement with Displacement sensor .
PLATO VCSEL and NIR LD
Automatic Photoluminescence mapping system
PLATO data : 940nm VCSEL.
PLATO data : NIR for optical communication and gas sensor.
Special functions of PLATO
Specification.
| Light source | UV | 213nm, 266nm, 325nm |
| VIS | 375nm, 405nm, 532nm | |
| NIR | 980nm, 1064nm | |
| Measurement Item | DBR 측정 | Visible range, NIR range |
| Bow 측정 | 10~1000um | |
| Laser Marking | CE-CoC, CE-DoC, KCs, S-Mark | Sapphire, Si, GaAs |
| Wafer Transfer | Robot type | Single-arm, Dual-arm |
| Cassette mapping sensor | ||
| Wafer size | SEMI standard 2”, 3”, 4”, 6”, 8”, 12” | |
| Cassette type | Open Cassette, SMIF, FOUP | |
| Identification | Wafer ID reader, Cassette ID reader | |
| Certification | CE-CoC, CE-DoC, KCs, S-Mark | |
| Etc. | SECS/GEM | |