Model |
OPM-300T |
OPM-300T-IRBF |
OPM-300R |
H/W General |
Multi sample loading system |
4 axis motorized stage (XY,Tray,R) |
5 axis motorized stage (XY,Tray,R1,R2) |
Automatically adjustable incidenct angle (Variable AOI between, 300T, 300T-IRBF : 0-45°, 300R : 5-35°)
|
Measurable Range |
350-1300 nm |
800-1100 nm |
380-800 nm |
CCD Pixel Dispersion |
1st : Approx. 0.43 nm 2nd(1100nm~) : Approx. 2.34nm
|
Approx. 0.2 nm |
Approx. 0.21 nm |
Light Source |
UV lamp, Tungsten halogen lamp |
Tungsten halogen lamp |
Measurement Item |
Wavelength at T(R)n%, T(R)% at n wavelength, T(R) Avg/Max/Min, Slope, Δwavelength of different incident angle
|
Repeatability / Reproducibility |
Related with λ item : 1st ≤±0.3 nm, 2nd(300T only) ≤±1 nm Related with T% item : ≤±0.4%
|
Related with λ item : 1st ≤±0.3 nm Related with R% item : ≤±0.25%
|
S/W General |
Operator, Engineer, Maintenance mode |
Mapping & Multi Point Measure function by user recipe |
Measurement Capa. ( 1point/filter, 1 angle) |
Approx. 216,000 pcs/month(24h x 30d) |
Operating Environment
|
Place : Clean Room (Class -10,000) |
15-35℃ |
< 85% RH with no condensation |
Dimension (WxDxH)
|
1230 x 1515 x 1142 mm |
1550 x 1515 x 1142 mm |
Weight |
Approx. < 400 kg
|
Approx. < 450 kg
|
Power Spec. |
Single phase, 220 V, 15 A |